IEC IEC 62047-36 Edition 1.02019-04 INTERNATIONAL STANDARD colour inside Semiconductor devices - Micro-electromechanical devices - Part 36: Environmental and dielectric withstand test methods for MEMS piezoelectric thin films IEC 62047-36:2019-04(en) THIS PUBLICATION IS COPYRIGHT PROTECTED Copyright @ 2019 IEC, Geneva, Switzerland All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized in any form or by any means, electronic or mechanical, including photocopying and microfilm, without permission in writing from copyright or have an enquiry about obtaining additional rights to this publication, piease contact the address below or your local IEC member National Committee for further information. IEC Central Office Tel.: +41 22 919 02 11 3, rue de Varembe [email protected] CH-1211Geneva 20 www.iec.ch Switzerland About the IEC The International Electrotechnical Commission (IEC) is the leading global organization that prepares and publishes International Standards for all electrical, electronic and related technologies. About IEC publications The technical content of IEC publications is kept under constant review by the IEC. Please make sure that you have the latestedition,a corrigendum oran amendment might have beenpublished IEC publications search - webstore.iec.ch/advsearchform Electropedia-www.electropedia.org The advanced search enables to find IEC publications by a The world's leading online dictionary on electrotechnology, varietyof criteria(reference number,text, technical containing more than 22 000 terminological entries in English committee...). It also gives information on projects, replaced and French, with equivalent terms in 16 additional languages. and withdrawn publications. Also known as the International Electrotechnical Vocabulary (IEV) online. IEc Just Published - webstore.iec.ch/justpublished Stay up to date on all new IEC publications. Just Published IEc Glossary - std.iec.ch/glossary details all new publications released. Available online and 67 000 electrotechnical terminology entries in English and once a month by email. French extracted from the Terms and Definitions clause of IEC publications issued since 2002. Some entries have been IECCustomerServiceCentre-webstore.iec.ch/csc collected from earlier publications of IEC TC 37, 77, 86 and If you wish to give us your feedback on this publication or CISPR. need further assistance,please contact the Customer Service Centre: [email protected]. IEC IEC 62047-36 Edition 1.02019-04 INTERNATIONAL STANDARD colour inside Semiconductor devices -Micro-electromechanical devices- Part 36: Environmental and dielectric withstand test methods for MEMS piezoelectric thin films INTERNATIONAL ELECTROTECHNICAL COMMISSION ICS 31.080.99; 31.140 ISBN 978-2-8322-6720-2 Warning! Make sure that you obtained this publication from an authorized distributor.