ISO/TR TECHNICAL REPORT 21254-4 First edition 2011-09-01 Lasers and laser-related equipment - Test methods for laser-induced damage threshold - Part 4: Inspection, detection and measurement Lasers et équipements associés aux lasers Méthodes d'essai du seuil d'endommagement provoque parlaser- Partie 4: Inspection, détection et mesurages Reference number ISO/TR 21254-4:2011(E) @ ISO 2011 THS unde Not for Resale ISO/TR21254-4:2011(E) COPYRIGHTPROTECTEDDOCUMENT @ISO2011 All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized in any form or by any means, electronic or mechanical, including photocopying and microfilm, without permission in writing from either Iso at the address below or ISo's member body in the country of the requester. ISO copyright office Case postale 56 . CH-1211 Geneva 20 Tel. + 41 22 749 01 11 Fax + 41 22 749 09 47 E-mail [email protected] Web www.iso.org Published in Switzerland @ ISO 2011 - All rights reserved itted without license from IHS Not for Resale ISO/TR21254-4:2011(E) Contents Page Foreword .iv Introduction 1 Scope 2 Normative references. 3 Terms and definitions 4 Damage detection methods 4.1 General .... 4.2 Summary of damage detection methods 4.3 Collection of radiation from the sample..... 4.3.1 Scatter detection techniques ... 4.3.2 Detection of plasma and thermal radiation.... 4.3.3 4.4 Detection of changes in reflectance or transmittance and imaging techniques.. 4.4.1 Online detection of changes in reflectance or transmittance. 4.4.2 Online microscopy ... 4.5 Photothermal detection schemes 4.5.1 General... 4.5.2 Photothermal deflection and surface thermal lensing 4.5.3 10 4.6 Transient pressure sensing ... 10 5 Inspection techniques after the laser test sequence.... 5.1 General 11 5.2 Nomarski microscopy.. 12 5.3 Microscopic image comparator 12 5.4 Laserscanningmicroscopy. 14 5.5 Mapping techniques. 15 5.6 16 5.7 Atomic force microscopy 5.8 Confocal microscopy 17 Bibliography. 19 Copyrght International OrganizaionStandardizaonghts reserved ii nse from IHS Not for Resale